High-voltage CV measurement system: CS-605A (5kV) / CS-603A (3kV)
Optimal for capacitance measurement of power semiconductor devices such as SiC and GaN

Automated capacity measurement up to 5kV (CS-605A) or 3kV (CS-603A) (with Sweep function)

Curve tracer adapters compatible with various device packages can be used as they are

Supports systemization with probe stations for capacitance measurement on wafers and chips

Capacitance measurement of high voltage capacitors is also possible

Item

CS-605A

CS-603A

DC bias

0-5kV / 0-50V

0-3kV / 0-50V

Setting resolution

100mV / 1mV

Measurement range

10kHz 100pF to 10nF ±5% (±2pF)
100kHz 10pF to 1nF ±5% (±2pF)
Cgd:Cds:Cgs=1:1:1, Cgd:Cds:Cgs=1:10:100

Frequency range

10kHz-100kHz

LCR meter
measurement signal level range

100mV ~ 1V

Measurement parameter

Cies, Ciss (input capacitance), Coes, Coss (output capacitance), Cres, Crss (reverse transfer capacitance),
CT (capacitance between terminals), Cgs, Cge/Cgd, Ccg/Cds, Cce (calculated value), Rg ( Gate resistance)

Measurement mode

CV: Capacitance vs Bias voltage, CG: Capacitance vs Gate voltage, C-Time: Capacitance vs Time

Gate bias

+/-25V at 1mV/step

Sweep type

Linear / Log / List / Single

Sweep direction

UP Sweep

Measuring point

5000 points

Other

Waveform comparison, REF display, interlock function, external interlock (option)

External dimensions / mass

Approx. 330W x 370D x 230H (mm) *Excluding protrusions / Approx 8.5kg

Operating temperature range

0 ℃ ~ +40 ℃

Performance guaranteed temperature range

+10 ℃ ~ +35 ℃

Operating humidity range

0 to +40°C, 5% to 80% RH (30°C, non-condensing)
Upper limit value 55% RH (40°C, non-condensing)

Power input range

AC 100-240 V 50/60Hz

power consumption

25W